Elli-SEUN (Ellipsometer) > Spectroscopic Ellipsometer

Spectroscopic Ellipsometer(SE), the industry standard technology that enables one to accurately measure thickness and optical constants of thin film, simultaneously, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.) including AR coatings, OLED, and low(high)-materials.

◈ FEATURE
  1. Easy Operation & Fast Measurement
  2. High Reproducibility
  3. User-Friendly Operation
  4. Non-contact & Non-destructive
  5. Multi-Layer Measurement
  6.  Wide Spectral Range
 
◈ SPECIFICATION
  1. Measuring constants
      - Film thickness, n, k vs λ
  2. Thickness range
      - sub Å ~ 10 μm (depends on film type)
  3. Wavelength range
      - 240 ~ 1700 nm
      - Option of Spectral Range : (Duv:193nm, IR:900nm~ 2,200nm)
  4. Throughput
      - Normal mode(~10 sec)
      - fast mode (1~3 sec) per point(depends on film type)
  5. Beam Spot-size
      - 1.5 mm  (Optional 100μm, 50 μm, 20 μm)
  6. Angle of incidence
      - 45°~90° (Step 5°, manual type)
  7. Number of layers
      - Up to ten(10) layers (depends on film type)
  8. Repeatability
      - (3σ) ±0.3 Å on 10 times measurement
  9. Application
      - Semiconductors, Display, Optical Coatings, Chemistry/Biology, Conductive Organics, Photovoltaics etc.
         Thickness of Dielectrics, Semiconductors, Polymers,
         Supporting Backside/Front side Reflections,
         Very Thin Films, Very Thick Films
         Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)
  10. Providing features
      - Refractive Index, Extinction coefficient and optical band gap
      - Film density and composition, Material's dispersion function library
      - User defined models capability, Data import & export functions, -
      - Extendable library

◈ OPTION
  1. Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)
  2. Option of Spectral Range (UV: 193 nm ~ 1,050 nm), (IR:, 900nm~ 2,200nm)
  3. Micro Spot Option (100 μm, 50 μm, 25 μm)
  4. Auto Alignment System, Automated Variable Angle of Incidence (45°~ 90°)