Elli-μSE_OCD > Spectroscopic Ellipsometer

Micro-spot Spectroscopic Ellipsometer for Semiconductor OCD Application : Ellipso Technology has recently developed a spectroscopic 

ellipsometer with the world's best spot size. AFM or NNISE can be mounted on this Elli-μSE_OCD and operated simultaneously. 

This micro-spot Spectroscopy Ellipsometer equipped with the mapping module and the variable angle-of-incidence module for improved 

measurement precision, is well suited for OCD measurement in semiconductor processes.

◈ Performance / System

   - Measurement mode : Rotating Compensator Ellipsometer (RCE)
   - Wavelength range : 190 ~ 850 nm
   - Measurement speed : ~ 3 s/sp
   - Spot size : ≦20 μm
   - Measurement repeatability : δ△=0.05°, δψ=0.02°
   - Variable angle of incidence : Automatic : 65˚~ 80˚, 0.1˚
   - Sample alignment : Automatic adjustment of height and azimuthal angle, Manual tilt adjustment
   - Mapping : Automatic (X,Y,θ) control : 300 mm wafer
   - Matching equipment : AFM or NNISE


◈ Schematic Diagram

◈ Application

- Semiconductor : OCD(of HAR) structure, Dielectrics
- Display : OLED, Dielectrics


▣ Supported by : KIAT(Korea Institute for Advancement of Technology)