Elli-RSc (Reflectometer) > Spectroscopic Reflectometer & Transmittance

Spectroscopic Reflectometer System with Microspot and Large Size Sample Stage

Spectroscopic Reflectometer(SR), the industry standard teengology that enables one to measure thickness and optical constants of thin film, in real time with a very small spot size, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.). It can be quite usefully used to characterize large-size sample with patterns on it.

◈PERFORMANCE

   1.Wavelength range : 450 ~ 900 nm
   2. Spot size : 50 um, 30 um, 10 um
   3.Thickness range : 10 nm ~ 50 μm (depends on film type)
   4.Number of layer : Up to 3 layer (depends on film types)
   5.Throughput : < 1 sec. per point (depends on film types)
   6.Reproducibility : ±1 Å on 10 times measurement

◈REFLECTOMETER SYSTEM

   1.Light source : 100 W Halogen Lamp
   2.Microscope system : Revolving nosepiece, Reflection probe head adapter
   3.Beam spot size : 50 um, 30 um, 10 um
   4.Spectral range : 450 ~ 900 nm
   5.Spectrograph : CCD type
   6.Stage size : 140 mm x 130 mm
   7.Moving stage stroke : 100 mm x 100 mm

◈APPLICATION

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◈OPTION

   1.Thick film measurement system : thickness range 1.0 ~ 300 um (mFFT*)
   2.Beam spot size : 4.0 um
   3.Stage size : 200 x 200 mm^2, 300  x 300 mm^2 and others (ask for a customized stage size)
   4.Auto focusing system : Color CCD camera
   5.Anti-vibration table :
   6.Transmittance module :
   7.Moving stage stroke : 100 mm x 100 mm