Elli-μSE_OCD
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Micro-spot Spectroscopic Ellipsometer for Semiconductor OCD Application : Ellipso Technology has recently developed a spectroscopic
ellipsometer with the world's best spot size. AFM or NNISE can be mounted on this Elli-μSE_OCD and operated simultaneously.
This micro-spot Spectroscopy Ellipsometer equipped with the mapping module and the variable angle-of-incidence module for
improved measurement precision, is well suited for OCD measurement in semiconductor processes.
◈ Performance / System
Measurement mode | Rotating Compensator Ellipsometer (RCE) |
Wavelength range | 190 ~ 850 nm |
Measurement speed | ~ 3 s/sp |
Spot size | ≦20 μm |
Measurement repeatability | δ△=0.05°, δψ=0.02° |
Variable angle of incidence | Automatic : 65˚~ 80˚, 0.1˚ |
Sample alignment | Automatic adjustment of height and azimuthal angle, Manual tilt adjustment |
Mapping | Automatic (X,Y,θ) control : 300 mm wafer |
Matching equipment | AFM or NNISE |
◈ Schematic Diagram
◈ Application
- Semiconductor : OCD(of HAR) structure, Dielectrics
- Display : OLED, Dielectrics
▣ Supported by : KIAT(Korea Institute for Advancement of Technology)
첨부파일
- Elli-uSE_OCD_Catalog.pdf (255.8K) 131회 다운로드 | DATE : 2022-01-04 13:07:27
- Elli-uSE_OCD_Spec.pdf (1,004.5K) 109회 다운로드 | DATE : 2022-01-04 13:07:27