Elli-RPX(Reflectometer) > Spectroscopic Reflectometer & Transmittance

Spectroscopic Reflectometer(SR) system offers a robust, fast, and accurate value of film thickness

which is used in the various thin film processes. Ellipso Technology has the unique and advanced

technology of m-FFT for accurate and fast measurement/analysis of thin films.

◈SPECIFICATION 

   1.Measuring constants Film thickness, Reflectivity, (n,k) vs λ
   2.Wavelength range: 190 ~ 1050 nm(uv Option) or 380 ~ 1050 nm
   3.Spot-size: 1.0 mm 
   4.Thickness range: 1 nm ~ 20 μm (depends on film type)
   5.Number of layer: Up to 5 layers (depends on film type)
   6.Throughput : 1 sec/point (depends on film type)
   7.Repeatability : ±0.5 Å on 10 times measurement 
   8.Working distance : 120 mm (Customized)
   9.Sample size: ~ 150mm or up Customized

◈APPLICATION

​Thickness of Dielectrics, Semiconductors, Polymers,
Supporting Backside/Front side Reflections, ​

Very Thin Films, Very Thick Films
Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)

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◈OPTION

   1.Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)
   2.Option of Spectral Range (UV: 190 nm ~ 1,050 nm), (IR: 900nm ~ 1,700nm, 900nm~2,200nm)
   3.Inline Thickness Monitoring (Multi probe, In-Situ, Flexible System Integration)