반사 대물 렌즈를 이용한 Microspot Spectroscopic Ellipsometer 개발 및 단층 MoS2의 Ellipsometric 특성화 > 공지사항

DOI : 10.3807 / COPP.2020.4.4.353 

Adopting an elaborately designed reflective objective consisting of four mirrors, we have developed a rotating-polarizer-type microspot spectroscopic ellipsometer (SE) with an ultra-small spot size. The diameter of the focused beam, whether evaluated using a direct-image method or a knife-edge method, is less than 8.4 μm. After proper correction for the polarizing effect of the mirrors in the reflective objective, we unambiguously determine the dispersion of the complex refractive index and the thickness of monolayer MoS2 using the measured microspot-spectroellipsometric data. The measured ellipsometric spectra are sensitive enough to identify small variations in thickness of MoS2 flakes, which ranged from 0.48 nm to 0.67 nm.

http://koreascience.or.kr/article/JAKO202024063316902.page